Elionix 150keV E-Beam Lithography System - Rm205

Last updated: 2024-01-17 09:31:05
IP1= 1.71e-07Pa    IP2= 2.07e-05Pa    IP3= 3.36e-05Pa   


Emi I = 192.0uA    Fil I = 2.3A    Ext V = 5.3V    Sup V = 300.0V   


Please contact Edmond Chow if you have questions.
Holonyak Micro & Nanotechnology Lab