Elionix 150keV E-Beam Lithography System - Rm205
Last updated: 2023-04-16 15:37:53
IP1= 1.71e-07Pa IP2= 2.07e-05Pa IP3= 3.36e-05Pa
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Emi I = 157.0uA Fil I = 2.3A Ext V = 5.3V Sup V = 310.0V
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